Nanofabrication Equipment to Make Ultrafine Fluidic Devices
BioSystems Building, Osaka University
Would you like to try using a microdevice that incorporates nanometer-scale channels?
(▲top image) An instrument that uses electron beams to draw fine patterns. This semiconductor processing technique (lithography) used to draw circuits on resist-coated material was adapted for biological research. The room uses “yellow light” to protect the resist layer.